| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flaw measuring method capable of simply discovering and measuring a defect of an optical element. <P>SOLUTION: In a flaw measuring method related to a first point of view, an object to be measured is irradiated with light from a light source, convergent light is formed and made incident on the object to be measured, the object to be measured or the light source is moved until the focus of the convergent light reaches from one surface of the object to be measured to the other surface thereof, the distance between the one surface of the object to be measured and a defect existing in the object to be measured is measured, and depth of the defect from the one surface is calculated by obtaining a value by multiplying the distance by a refraction index of the object to be measured. <P>COPYRIGHT: (C)2013,JPO&INPIT |
