摘要 |
The invention is to provide a structure of a semiconductor device which achieves quick response and high-speed drive by improving on-state characteristics of a transistor, and to provide a highly reliable semiconductor device. In a transistor in which a semiconductor layer, a source and drain electrode layers, a gate insulating film, and a gate electrode are sequentially stacked, a non-single-crystal oxide semiconductor layer containing at least indium, a Group 3 element, zinc, and oxygen is used as the semiconductor layer. The Group 3 element functions as a stabilizer.
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