发明名称 |
TESTING APPARATUS FOR PIEZOELECTRIC/ELECTROSTRICTIVE DEVICE |
摘要 |
There is provided a method for testing a piezoelectric/electrostrictive actuator, wherein the displacement of a piezoelectric/electrostrictive actuator is estimated on the basis of the relations between one or more frequency characteristic values selected from the group consisting of the heights and areas of the peaks of the resonance waveforms and the difference of the maximum and minimum of the first order or first to higher orders of the resonance frequency characteristic values of the piezoelectric/electrostrictive actuator and the k-th order (k=1 to 4) of the first or first to higher orders of resonance frequencies. According to this piezoelectric/electrostrictive actuator testing method, a piezoelectric/electrostrictive actuator can be tested with high precision without actually driving the same as a product and without being accompanied by any disassembly/breakage. |
申请公布号 |
US2013033266(A1) |
申请公布日期 |
2013.02.07 |
申请号 |
US201213645797 |
申请日期 |
2012.10.05 |
申请人 |
NGK INSULATORS, LTD.;GOTO NAOKI;OHNISHI TAKAO |
发明人 |
GOTO NAOKI;OHNISHI TAKAO |
分类号 |
G01R31/327;H01L41/22;H01L41/253 |
主分类号 |
G01R31/327 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|