发明名称 |
PERMEABLE MEMBRANE INSPECTING DEVICE OF GLASS |
摘要 |
PURPOSE: An apparatus for inspecting a film on a substrate is provided to prevent display errors by efficiently inspecting the twist of the film coated on the surface of the substrate. CONSTITUTION: A lighting module(20) is arranged on the lower side of an inspection table(10). The lighting module irradiates light to the substrate. A camera module(30) is arranged on the upper side of the lighting module and photographs the edges of a vertical part and a horizontal part, and the surface of the substrate. An inspecting unit controls the operation of the camera module and the lighting module.
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申请公布号 |
KR101231184(B1) |
申请公布日期 |
2013.02.07 |
申请号 |
KR20110128434 |
申请日期 |
2011.12.02 |
申请人 |
SEMISYSCO CO., LTD. |
发明人 |
LEE, SOON JONG;WOO, BONG JOO;PARK, BYOUNG CHAN |
分类号 |
H01L51/56;G01N21/88;G02F1/13 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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