发明名称 PERMEABLE MEMBRANE INSPECTING DEVICE OF GLASS
摘要 PURPOSE: An apparatus for inspecting a film on a substrate is provided to prevent display errors by efficiently inspecting the twist of the film coated on the surface of the substrate. CONSTITUTION: A lighting module(20) is arranged on the lower side of an inspection table(10). The lighting module irradiates light to the substrate. A camera module(30) is arranged on the upper side of the lighting module and photographs the edges of a vertical part and a horizontal part, and the surface of the substrate. An inspecting unit controls the operation of the camera module and the lighting module.
申请公布号 KR101231184(B1) 申请公布日期 2013.02.07
申请号 KR20110128434 申请日期 2011.12.02
申请人 SEMISYSCO CO., LTD. 发明人 LEE, SOON JONG;WOO, BONG JOO;PARK, BYOUNG CHAN
分类号 H01L51/56;G01N21/88;G02F1/13 主分类号 H01L51/56
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