| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technology capable of acquiring at high speed an image of high quality with optical aberration due to a protection member suitably corrected even when a variation exists in the thickness of the protection member. <P>SOLUTION: The imaging apparatus includes: an imaging unit with an imaging optical system and an imaging section; a measuring section for measuring an optical aberration or a physical quantity which becomes a factor in aberration respectively for a plurality of regions in the sample before imaging the sample in the imaging unit; a plurality of optical elements with different correction amounts which are optical elements inserted into an optical path of the imaging optical system for correction of the aberration; and a control section for selecting an optical element from the plurality of optical elements on the basis of the measured result of the measuring section and inserting the selected optical element into the optical path of the imaging optical system when the sample is imaged in the imaging section. In this case, the imaging optical system is adapted to form images of the plurality of regions simultaneously in the imaging section. <P>COPYRIGHT: (C)2013,JPO&INPIT |
