THREE-DIMENSIONAL MEASUREMENT DEVICE AND THREE-DIMENSIONAL MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To prevent photographing from becoming difficult while line light is not regularly reflected toward photography means.

SOLUTION: Three-dimensional measurements of a body 1 to be inspected can be made in a light cutting method by photographing line light 4 by photographing means 26 while irradiating the body 1 to be inspected with the line light 4 and relatively moving both of them. The body 1 to be inspected has a plurality of unevenness parts 3 provided to a workpiece in an array in a predetermined array direction A, and the unevenness parts 3 have a linear part 3a in a direction orthogonal to the array direction A. The relative movement direction B of the line light 4 and the angle θ of the line light 4 to the relative movement direction are so set in advance that the line light 4 is relatively moved during the irradiation while obliquely crossing the linear part 3a.

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