| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an inkjet recording head substrate capable of forming a positioning reference mark in a small number of steps and manufacturing a liquid supply port accurately in a short time even though the substrate is a silicon substrate having an inorganic material layer on the rear surface (a second surface). <P>SOLUTION: A method of manufacturing a liquid ejection head substrate for forming, on a silicon substrate having a first surface and a second surface opposed to each other, a liquid supply port penetrating from the second surface to the first surface of the substrate, includes the steps of forming a wiring pattern on the first surface, forming an etching mask layer on the second surface, forming a positioning reference mark on the mask layer from the top of the mask layer using a laser, forming an opening pattern groove portion penetrating the mask layer and having a bottom in the silicon substrate by a laser using the positioning reference mark, and performing crystal anisotropic etching from the opening pattern groove portion to the first surface, thereby forming a liquid supply port penetrating the silicon substrate. <P>COPYRIGHT: (C)2013,JPO&INPIT |
