发明名称 SYSTEMS AND METHODS FOR PROVIDING MIRRORS WITH HIGH STIFFNESS AND LOW INERTIA INVOLVING CHEMICAL ETCHING
摘要 A method is disclosed of fabricating a mirror for use in limited rotation motor systems, said method comprising the steps of providing a mirror structure including at least one wall section, and exposing the at least one wall section to a fluid etching agent to thereby provide chemical milling of the mirror structure.
申请公布号 WO2013019607(A2) 申请公布日期 2013.02.07
申请号 WO2012US48513 申请日期 2012.07.27
申请人 GSI GROUP CORPORATION;BROWN, DAVID, C. 发明人 BROWN, DAVID, C.
分类号 G02B26/08 主分类号 G02B26/08
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