| 摘要 |
<P>PROBLEM TO BE SOLVED: To protect boding wire even against sudden pressure fluctuation while miniaturizing constitution in a pressure sensor which measures pressure of measurement fluid containing liquid. <P>SOLUTION: A sensor chip 30 for pressure detection is arranged on a recess bottom surface 24a of a first housing 20, and the sensor chip 30 is connected to a terminal 40 held by the first housing 20 via bonding wire 50. The sensor chip 30, an end 41 of the terminal 40, and the bonding wire 50 are protected by a protection member 60. The protection member 60 has: an elastic member 61 in which liquid rubber is hardened; and a high hardness member 62 which consists of a material with a Young's modulus higher than that of the elastic member 61, at least a part of which is embedded and held in the elastic member 61. With the elastic member 61, at least a part of the sensor chip 30, the end 41 of the terminal 40, and the bonding wire 50 are coated, and the high hardness member 62 is arranged at an upper part of a diaphragm 31. <P>COPYRIGHT: (C)2013,JPO&INPIT |
