| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technology which smoothly conducts resumption operation while avoiding the occurence of collision accidents between members when driving force of a stage is lost. <P>SOLUTION: A substrate transfer device 10 comprises: a base 11; a stage 12 where a placement surface 120, allowing a substrate to be placed on its upper surface, is formed; a stage driving mechanism 15 moving the stage 12 relative to the base 11; and a braking part 16 braking so as to prevent the stage 12 from moving from a delivery position Q where the substrate W is received by or transferred from the stage 12. A brake control part 901, controlling the braking part 16, brakes a base plate 154 supporting the stage 12 on the braking part 16, for example, when electric power supply to the stage driving mechanism 15 is cut off in a state that the stage 12 is disposed on the delivery position Q. <P>COPYRIGHT: (C)2013,JPO&INPIT |
