| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection method for a laminate film that enables quick and easy evaluation of a gas barrier property. <P>SOLUTION: An inspection method for a laminate film, which comprises a substrate and a thin layer that is formed at least on one surface of the substrate and contains at least silicon, oxygen and hydrogen, includes the steps of: obtaining an abundance ratio of silicon atoms within the thin layer through<SP POS="POST">29</SP>Si solid NMR measurement of the thin layer, with respect to each quantity of neutral oxygen atoms binding to the silicon atoms; and determining a gas barrier property of the thin layer on the basis of a preliminarily-obtained correspondence relationship between the gas barrier property of the thin layer and the abundance ratio of the silicon atoms. <P>COPYRIGHT: (C)2013,JPO&INPIT |
