| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a floating device that enables measurement and assembling to be carried out even if a gage head and a robot chuck slightly shift in position when adjusting their positions. <P>SOLUTION: There is provided a floating device 1 including: a plate-like fitting member 2 having a rod-like fixed shaft 3 projecting in the center of one surface; a cylindrical body 4 which is fitted around an outer periphery of the fixed shaft 3, and has its base part fixed to the fitting member 2 through an elastic member; and an air pad 5 which is interposed between the outer periphery of the fixed shaft 3 and an inner surface of the cylindrical body 4 to elastically hold the cylindrical body 4. <P>COPYRIGHT: (C)2013,JPO&INPIT |
