发明名称
摘要 <p>Measuring a shape of an optical surface (14) of a test object (12) includes: providing an interferometric measuring device (16) generating a measurement wave (18); arranging the measuring device (16) and the test object (12) consecutively at different measurement positions relative to each other, such that different regions (20) of the optical surface (14) are illuminated by the measurement wave (18); measuring positional coordinates of the measuring device (16) at the different measurement positions in relation to the test object (12); obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave (18) after interaction with the respective region (20) of the optical surface (14) using the measuring device (16) in each of the measurement positions; and determining the actual shape of the optical surface (14) by computationally combining the surface region measurements based on the measured positional coordinates of the measuring device (16) at each of the measurement positions.</p>
申请公布号 JP2013504762(A) 申请公布日期 2013.02.07
申请号 JP20120529129 申请日期 2009.09.18
申请人 发明人
分类号 G01B11/24;G01B9/02 主分类号 G01B11/24
代理机构 代理人
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