METHODS OF POLYMERIZING SILANES AND CYCLOSILANES USING N-HETEROCYCLIC CARBENES, METAL COMPLEXES HAVING N-HETEROCYCLIC CARBENE LIGANDS, AND LANTHANIDE COMPOUNDS

摘要

Compositions and methods for controlled polymerization and/or oligomerization of silane (and optionally cyclosilane) compounds, including those of the general formulae SinH2n and SinH2n+2, as well as halosilanes and aiylsilanes, to produce soluble polysilanes, polygermanes and/or polysilagemianes having low levels of carbon and metal contaminants, high molecular weights, low volatility, high purity, high solubility and/or high viscosity. The polysilanes, polygermanes and/or polysilagemianes are useful as a precursor to silicon- and/or germanium-containing conductor, semiconductor and dielectric films.