METHOD OF REMOVING LIQUID FROM A BARRIER STRUCTURE
摘要
The present invention provides a tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like.
申请公布号
US2013032172(A1)
申请公布日期
2013.02.07
申请号
US201213647910
申请日期
2012.10.09
申请人
FSI INTERNATIONAL, INC.;FSI INTERNATIONAL, INC.
发明人
COLLINS JIMMY D.;DEKRAKER DAVID P.;GAST TRACY A.;ROSE ALAN D.