SUBSTRATE SUPPORTING EDGE RING WITH COATING FOR IMPROVED SOAK PERFORMANCE
摘要
<p>Embodiments of the present invention provide a substrate supporting edge ring for supporting a substrate. In one embodiment, a substrate support ring is provided. The substrate support ring comprises an annular body. The annular body comprises an outer band extending radially inward from an outer annular sidewall; and a substrate supporting region extending inward from an inner portion of the outer band, wherein the annular body comprises a first material that is exposed and at least a portion of the substrate supporting region is covered with a coating comprising a second material that is different than the first material.</p>
申请公布号
WO2013019358(A1)
申请公布日期
2013.02.07
申请号
WO2012US45453
申请日期
2012.07.03
申请人
APPLIED MATERIALS, INC.;RANISH, JOSEPH M.;HUNTER, AARON MUIR