Gripper of robot for gripping or holding disc-shaped substrate, has base having surface from which spacers project, to guide fluid to flow along surface to opening

摘要

The gripper (1) has a base (3) having a surface (4) from which spacers (5) project, and opening (6) to communicate or connect with a negative pressure source. The spacers guide the fluid to flow along the surface to the opening. The spacer is spaced from a substrate (2) with intermediate space (8) which is in flow connection with opening. An independent claim is included for method for gripping or holding disc-shaped substrate.