| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a process of forming a microphone using a support member. <P>SOLUTION: A method of forming a microphone includes forming a backplate, and a flexible diaphragm on at least a portion of a wet etch sacrificial layer. The method also includes adding a wet etch resist material, where the wet etch resist material is positioned between the diaphragm and the backplate to support the diaphragm. Some of the wet etch resist material is not positioned between the diaphragm and backplate. The method further includes removing the sacrificial material before removing any of the wet etch resist material added during the above-mentioned addition. Then, the wet etch resist material is removed substantially entirely after at least part of the sacrificial material is removed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
