发明名称 FIELD EFFECT TRANSISTOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a III-V FET having enhanced electron supply capacity to a channel. <P>SOLUTION: A channel layer 4 of a narrow band gap material is formed on a substrate 2, and a contact layer 6 of a wide band gap material is formed on a source region on the channel layer 4. The source contact layer 6 is doped at a concentration of 1&times;10<SP POS="POST">19</SP>cm<SP POS="POST">-3</SP>and over. An FET 1 is constituted such that a carrier is directly injected into the undoped channel layer 4 by the source contact layer 6. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP2013030604(A) 申请公布日期 2013.02.07
申请号 JP20110165385 申请日期 2011.07.28
申请人 TOKYO INSTITUTE OF TECHNOLOGY 发明人
分类号 H01L21/338;H01L21/336;H01L29/778;H01L29/78;H01L29/812 主分类号 H01L21/338
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