| 发明名称 |
FOUP OPENER |
| 摘要 |
<p>PURPOSE: A FOUP(Front Open Unified Pod) opener is provided to prevent the deterioration of a wafer by forming a natural oxidation layer through the reduction of purging time. CONSTITUTION: A docking bracket(210) is detachably formed on a FOUP. A loading cylinder(230) moves the docking bracket. An outer door(310) is installed on the rear of a frame. A supply nozzle is installed in one side of the outer door and inputs nitrogen gas. An exhaust nozzle is formed on the other side of the outer door and discharges nitrogen gas.</p> |
| 申请公布号 |
KR101231231(B1) |
申请公布日期 |
2013.02.07 |
| 申请号 |
KR20120026119 |
申请日期 |
2012.03.14 |
| 申请人 |
YOO, JEONG HO;NANO SEMICON CO., LTD. |
发明人 |
YOO, JEONG HO |
| 分类号 |
H01L21/67;H01L21/02;H01L21/677 |
主分类号 |
H01L21/67 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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