| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a high-performance angular velocity detecting device. <P>SOLUTION: A driving part comprising an exciting element 13 and a Coriolis element 14 is levitated by at least two fixing beams 12a which share a fixed end and are extending in a direction orthogonal to a vibrating direction, thereby vibrating the driving part. Even when a substrate is deformed by mounting or heat fluctuation, internal stress generated to the fixing beams and a supporting beam is small, thereby a vibrating state such as resonance frequency and vibration amplitude is maintained constant. Therefore, a high-performance angular velocity detecting device which is robust to change in mounting environment can be obtained. <P>COPYRIGHT: (C)2013,JPO&INPIT |
