X-RAY ANALYZER AND X-RAY ANALYSIS METHOD

摘要

An X-ray analyzer (1) includes: a transmission X-ray inspecting portion (10) including: a first X-ray source (12); and a transmission X-ray detector (14) for detecting a transmission X-ray (12x) having passed through a sample (100) from the first X-ray source; a fluorescent X-ray inspecting portion (20) including: a second X-ray source (22); and a fluorescent X-ray detector (24) for detecting a fluorescent X-ray (22y) output from the sample when the sample is irradiated with an X-ray from the second X-ray source; a movement mechanism (30) for moving a sample stage (50); a foreign matter position calculating unit (60) for calculating a position of a foreign matter (101); and a movement mechanism control unit (61) for controlling the movement mechanism so that the position of the foreign matter calculated by the foreign matter position calculating unit coincides with an optical axis (22c) of the second X-ray source.