| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ion content measurement device capable of measuring ion content with high precision by reducing influence of a leakage current, an ion content measurement method, and an ion generation device. <P>SOLUTION: An ion content measurement device includes a collection electrode 86 which collects ions generated by an ion generation part 6; a measurement part 87 which measures potential of the collection electrode 86, and a CPU 81 which places the ion generation part 6 in an operation state for generating ions or a non-operation state for not generating ions, and calculates and measures an amount of ions on the basis of a difference between a measurement result by the measurement part 87 in a period in which the ion generation part 6 is in the operation state and a measurement result by the measurement part 87 in a period in which the ion generation part 6 is in the non-operation state. <P>COPYRIGHT: (C)2013,JPO&INPIT |
