| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an electrostatic actuator which can maximize the deformation amount of a diaphragm without causing diaphragm breakdown, and to provide a liquid droplet discharge head. <P>SOLUTION: The electrostatic actuator includes the diaphragm 4 and individual electrodes 10 facing the diaphragm 4 separately at a gap G, and deforms the diaphragm 4 by an electrostatic attraction force by applying a driving voltage between the diaphragm 4 and each of the individual electrodes 10. A distance between the diaphragm 4 and each of the individual electrodes 10 is longer at an outer peripheral part 10b than at an central part 10a of each of the individual electrodes. <P>COPYRIGHT: (C)2013,JPO&INPIT |
