| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a joining method of a base substance and a lid which deals with the downsizing of the base substrate and the lid and inhibits the occurrence of the distortion without impairing the external appearance, and to provide a joining apparatus conducting the joining method. <P>SOLUTION: In a joining method of this invention, a lid 530 is placed in a package 520 so as to close an opening of a recessed part 521. Further, a plasma electrode 130 is disposed forming a space with the lid 530, and a ground electrode 140 is placed in connection with the lid 530. Then, plasma glow discharge P is caused by applying a voltage to a plasma electrode 130 while supplying a process gas to the space between the plasma electrode 130 and the lid 530. This process causes a current to flow through the lid 530 and melts a contact part, contacting with the package 520, with resistive heat occurring in the contact part to weld the lid 530 to the package 520. <P>COPYRIGHT: (C)2013,JPO&INPIT |
