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摘要
申请公布号
JP2013504885(A)
申请公布日期
2013.02.07
申请号
JP20120529176
申请日期
2010.07.27
申请人
发明人
分类号
H01L21/822;H01F17/00;H01F19/04;H01L27/04;H01L43/06
主分类号
H01L21/822
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