发明名称 TOOL MANAGEMENT METHOD OF DIE BONDER AND DIE BONDER
摘要 RFID tags are attached to tools of a preform head, a bonding head, and a push-up unit, and information related to each tool such as a dimension of a processing-target die is stored into the RFID tags. When a tool is mounted, an operator inputs manufacturing conditions related to the tool. When information related to the tool read from the RFID tag by an RFID reader/writer and the manufacturing conditions related to the tool do not match each other, a message about wrong mounting of the tool is displayed on a monitor. Further, an operation history of the tool is written into the RFID tag by the RFID reader/writer when the production is completed. The operation history is read when the next production is started, and if the values of the operation history exceed predetermined numbers of times, a message is displayed on the monitor.
申请公布号 KR101231347(B1) 申请公布日期 2013.02.07
申请号 KR20110021182 申请日期 2011.03.10
申请人 发明人
分类号 H01L21/58 主分类号 H01L21/58
代理机构 代理人
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