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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS57126147(A)
申请公布日期
1982.08.05
申请号
JP19810011447
申请日期
1981.01.28
申请人
FUJITSU KK
发明人
SASAKI NOBUO
分类号
H01L21/033;H01L21/28;H01L21/3105;H01L21/768
主分类号
H01L21/033
代理机构
代理人
主权项
地址
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