| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical waveguide substrate having an optical waveguide using a resin-based material which is excellent in crack resistance and further excellent also in reliability for temperature cycle or leaving in moisture. SOLUTION: An optical waveguide composed of a siloxane polymer film is formed by performing a first step of forming a siloxane polymer film by applying a siloxane polymer film forming coating liquid composition containing silanol groups onto a substrate and mutually dehydration-polymerizing the silanol groups in a nitrogen atmosphere at a temperature ranging from 150 to 220°C for 10 minutes to 4 hours, and then performing a second step of promoting dehydration polymerization reaction of the silanol groups left in the siloxane polymer film by dipping the siloxane polymer film in an acid solution. The surface of the optical waveguide is covered with a protective layer formed of an oxide, a nitride or an oxynitride. COPYRIGHT: (C)2010,JPO&INPIT |
