| 摘要 |
The invention relates to a detector element device (2, 14) for detecting particle radiation (3). The detector element device (2, 14) has a substrate layer (4) and two electrode layers (5, 6, 15, 16). The substrate layer (4) consists of hetero-epitaxially produced diamond material (23) at least in regions, while at least one electrode layer (5, 6, 15, 16) consists of diamond-like carbon (29) at least in regions. |
