发明名称
摘要 A composition for forming a lower layer film comprises a polymer(A) having a naphthalene derivative structural unit shown by the following formula (1), wherein R 1 represents a hydroxyl group and the like, X represents a substitutable alkylene group having 1 to 20 carbon atoms and the like, n represents 0 to 6, m represents 1 to 8, and n + m represents an integer from 1 to 8, provided that two or more R 1 s may be the same or different and two or more Xs may be the same or different.
申请公布号 JP5136407(B2) 申请公布日期 2013.02.06
申请号 JP20080505196 申请日期 2007.03.14
申请人 发明人
分类号 G03F7/11;C08G61/02 主分类号 G03F7/11
代理机构 代理人
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