SINGLE CHAMBER TYPE APPARATUS FOR DEPOSITION OF CDS

摘要

PURPOSE: A single chamber type CdS deposition apparatus is provided to improve deposition uniformity by mixing twice deposition liquid supplied to the upper part of a glass substrate. CONSTITUTION: A heating block(10) includes a heater. An upper cover(20) is formed in the upper part of the heating block. An inflow port(30) passes through the upper cover. The inflow port includes a first inlet(31), a second inlet(32) and a third inlet(33). A mixing blade is connected to an upper mixing motor(42) which is located in an upper cover panel(22).