发明名称 |
METHOD FOR MANUFACTURING FERROELECTRIC DEVICE |
摘要 |
A seed layer having a predetermined pattern is formed on a side of one surface of a second substrate, and a ferroelectric layer is formed on the side of said one surface of the second substrate. A lower electrode is formed on the ferroelectric layer, and the lower electrode and a first substrate are bonded via a bonding layer. A laser beam with a predetermined wavelength is irradiated from a side of other surface of the second substrate to transfer a ferroelectric film, which overlaps with the seed layer, of the ferroelectric layer and the seed layer onto the side of said one surface of the first substrate. The laser beam is a beam with a wavelength, herein the beam passes through the second substrate, and is reflected by the seed layer, and moreover is absorbed by a second portion of the ferroelectric layer. The second portion does not overlap with the seed layer. |
申请公布号 |
EP2555269(A1) |
申请公布日期 |
2013.02.06 |
申请号 |
EP20110765654 |
申请日期 |
2011.03.30 |
申请人 |
PANASONIC CORPORATION |
发明人 |
MATSUSHIMA, TOMOAKI;YAMAUCHI, NORIHIRO;OGAWA, JUNYA;AIZAWA, KOICHI |
分类号 |
H01L21/8246;H01L41/313;B81C3/00;G01J1/02;H01L27/105;H01L37/02;H01L41/08;H01L41/113;H01L41/18;H01L41/22;H01L41/316;H01L41/319;H01L41/33;H01L41/39 |
主分类号 |
H01L21/8246 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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