| 摘要 |
PURPOSE:To form a groove by the etching effect of an aq. activated soln. and heating and melting effect by laser light without shear droop and chipping by irradiating laser light via a mask to the surface of a work in an aq. soln. contg. phosphoric acid, glycerol and hydrochloric acid at a limited compounding ratio. CONSTITUTION:An aq. soln. contg. 1.0-2.0mol/l phosphoric acid, 1.0-1.7mol/l glycerol and 1.7-2.4mol/l hydrochloric acid is used for an aq. soln. 2. Copper or molybdenum having high reflectivity to laser light is used for a mask 6 to be placed on the surface of a work 3. On the other hand, laser light is irradiated along the slit 6a of the mask 6 by using a YAG solid state laser which generates near IR light having about 1.06mum wavelength for a laser oscillator 4 for irradiating the laser light. |
