发明名称
摘要 <P>PROBLEM TO BE SOLVED: To provide methods of manufacturing a tuning fork-shaped flexual quartz crystal resonator, including a tuning fork base and tuning fork tines connected thereto, a crystal unit having at least a casing housing the tuning fork-shaped flexual quartz crystal resonator a quartz crystal oscillator comprising at least the quartz crystal unit, and to provide a mobile device which is equipped with quartz the crystal oscillator. <P>SOLUTION: The tuning fork tines are formed before forming grooves, on upper and lower surfaces thereof and electrodes, each of which has a different electric pole, are disposed on side surfaces of the grooves and the side surfaces of the tuning fork tines, facing the side surfaces of the grooves, so that there are provided a quartz crystal unit including the extremely small turning fork-shaped flexual quartz crystal resonator having a high electromechanical conversion efficiency, a small equivalent series resistance R<SB>1</SB>, and a high Q-value, the quartz crystal oscillator equipped with the quartz crystal unit, and the mobile device equipped with the quartz crystal oscillator. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP5135565(B2) 申请公布日期 2013.02.06
申请号 JP20070317692 申请日期 2007.11.09
申请人 发明人
分类号 H03H3/02;H01L41/09;H01L41/18;H01L41/22;H01L41/23;H01L41/253;H01L41/29;H01L41/311;H01L41/313;H01L41/332;H03B5/32;H03H9/19;H03H9/215 主分类号 H03H3/02
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