| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator which attains structural working of a piezoelectric substrate required for energy confinement with high reproducibility, with the structural working allowing prevention of problems, such as variation in resonance characteristics or the frequency and the temperature characteristics of a piezoelectric vibrator or variations, in an equivalent circuit constant value produce by reduction in the chamfering dimensional precision of a compact piezoelectric substrate, and which is also appropriate in mass production, and to provide a method for manufacturing the piezoelectric vibrator. <P>SOLUTION: In the piezoelectric vibrator having a piezoelectric substrate which is excited by thickness-shear vibration as main vibration, an exciting electrode is formed in a center portion on both principal plane of the piezoelectric substrate and between a length-direction terminal portion of the piezoelectric substrate and the exciting electrode; a plurality of grooves or holes are formed by using photolithography; and etching or a doping layer is formed through ion implantation, thereby enabling energy to be confined in a vibrating area right under the exciting electrode. <P>COPYRIGHT: (C)2011,JPO&INPIT |
