| 摘要 |
PURPOSE:To monitor the intensity of ion beam through the accurate measurement thereof, by using a material emitting ultraviolet rays by the irradiation of ion beam. CONSTITUTION:The platform 18 of the optical scanning system 10 placed in a vacuum chamber 10 is scanned and moved by a scanning motor and screws 22, 24 and 26, 28 and the test plate such as an aluminum pellet, which emits ultraviolet rays at the irradiation time of ion beam, placed on the platform 18 is irradiated with the ion beam 30 from an ion beam source 12. By this irradiation, ultraviolet rays emitted from the test plate 16 are received by an ultrasonic ray detector 32 and the output of the detector 32 is written in memory through an A/D converter 14 and the intensity of ion beam is accurately measured without being subjected to the effect of external light and then monitored.
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