| 摘要 |
PURPOSE:To manufacture a magnetic body of a thin nitride film with superior magnetic characteristics, wear resistance and corrosion resistance by forming a thin film of a magnetic metal or alloy by a vapor deposition method while introducing nitrogen into the metal or alloy and by converting the resulting thin nitride film into an amorphous compound. CONSTITUTION:A magnetic metal such as Fe, Co or Ni or an alloy thereof in a crucible 3 set in a vacuum vessel 1 is melted and evaporated with an electron beam generating filament 2. At the same time, gaseous nitrogen is fed to the vessel 1 through a needle valve 4 until the vacuum degree gauged with a vacuum gauge becomes 5X10<-4>Torr. Thermions are emitted with filament 6 and an electrode 7 to excite and ionize the gaseous nitrogen atoms and the evaporated magnetic metal. At this time, by applying about 200V negative voltage to a polyimide film substrate 8 placed in the vessel 1, said metallic ions and nitrogen ions are accelerated and hit on the substrate 8 to deposit an amorphous thin metallic nitride film. Thus, a magnetic body is manufactured. |
