| 摘要 |
PURPOSE: A manufacturing method of a solid electrolyte thin film is provided to improve film growth rate by an organic metal chemical vapor evaporation, to minimize damages on a substrate and a lower film, and to make conformal deposition possible to be applied to a thin film battery with a trench structure. CONSTITUTION: A manufacturing method of a solid electrolyte thin film comprises: a step of inserting a substrate into a reaction space(S110); a step of heating the substrate by applying energy into the reaction space(S120); a step of injecting a lithium precursor gas, phosphorous, or boron precursor gas, with nitrogen precursor gas into the reaction space; and a step of forming the solid electrolyte thin film on the substrate by the reaction between the precursor gasses. The lithium precursor gas is Li(C11H19O2), and the phosphorous gas is one or more selected from PO(OCH3)3 and PO(OC2H5)3. [Reference numerals] (S110) Inserting a substrate into a reaction space; (S120) Applying energy into the reaction space and heating the substrate; (S130) Injecting precursor gas into the reaction space; (S140) Allowing reaction between the precursor gas and forming a solid electrolyte thin film |
