| 摘要 |
PURPOSE: A ceramic powder aerosol deposition method is provided to uniformly pile ceramic powder in an aerosol chamber by using a magnetic rotor. CONSTITUTION: A ceramic powder aerosol deposition method comprises the steps of: leading ceramic powder into an aerosol chamber(10), directly spraying carrier gas to the ceramic powder to obtain aerosol and rotating a magnetic rotor to prevent the deposition of ceramic powder on the bottom of the aerosol chamber, and accelerating the aerosol through vacuum expansion and discharging into a deposition chamber through a delivery pipe(30) to deposit the aerosol on a substrate. |
