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发明名称
摘要
申请公布号	JP5136370(B2)	申请公布日期	2013.02.06
申请号	JP20080291614	申请日期	2008.11.14
申请人		发明人
分类号	G01R31/28;H01L21/822;H01L27/04	主分类号	G01R31/28
代理机构		代理人
主权项
地址

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