发明名称 |
METHOD OF MAKING AMORPHOUS SEMICONDUCTOR ALLOYS AND DEVICES USING MICROWAVE ENERGY |
摘要 |
A process for depositing semiconductor alloy films on a substrate by supplying microwave energy to a first gaseous mixture held at subatmospheric pressure in a reaction vessel to establish a glow discharge in the mixture, characterized in supplying microwave energy to a second gaseous mixture remote from the substrate to form free radicals, conveying the free radicals to the vicinity of the substrate and incorporating the free radicals in the film. |
申请公布号 |
EG15981(A) |
申请公布日期 |
1987.10.30 |
申请号 |
EG19830000577 |
申请日期 |
1983.09.21 |
申请人 |
ENERGY CONVERSION DEVICES, INC. |
发明人 |
STANFORD R. OVSHINSKY;SAVID D. ALLRED;LEE WATER;STEPHEN J. HUDGENS |
分类号 |
C23C16/30;C23C16/50;C23C16/511;H01J37/32;H01L21/205;H01L31/04;(IPC1-7):H01L31/00 |
主分类号 |
C23C16/30 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|