发明名称 Ferroelectric memory and manufacturing method thereof
摘要 Provided is a ferroelectric memory including a silicon substrate, a transistor formed on the silicon substrate, and a ferroelectric capacitor formed above the transistor. The ferroelectric capacitor includes a lower electrode, a ferroelectric film formed on the lower electrode, an upper electrode formed on the ferroelectric film, and a metal film formed on the upper electrode.
申请公布号 US8368132(B2) 申请公布日期 2013.02.05
申请号 US20100873720 申请日期 2010.09.01
申请人 FUJITSU SEMICONDUCTOR LIMITED;NAGAI KOUICHI 发明人 NAGAI KOUICHI
分类号 H01L29/76;H01L21/00;H01L21/8242 主分类号 H01L29/76
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