摘要 |
PURPOSE:To improve the radiation energy resolution feature by a method wherein semiconductor detecting elements are arranged to partially overlap each other in facing a incident radiation beam. CONSTITUTION:A plurality of semiconductor detecting elements 11 is arranged to partially overlap each other and to meet the incident energy obliquely. In this arrangement, each of the semiconductor detecting elements 11 has a part 11a of its surface of incidence covered by a neighboring semiconductor detecting element 11. The areas exposed to incident radiation energy between electrodes are limited, represented by hatched windows in the figure. Accordingly, influence the incident radiation energy is placed under in terms of positioning because of the total charge induced on the electrode surfaces is alleviated, improving the radiation energy resolution feature without lowering the detecting element aperture rate.
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