发明名称 Manufacturing methods for write heads with floating side shields
摘要 Methods for manufacturing a magnetic head for a disk drive. The methods include the steps of depositing a first non-magnetic spacer layer, depositing a plating seed layer on the first non-magnetic spacer layer and plating at least one side shield and a pole tip layer on the plating seed layer, each of the at least one side shield and the pole tip layer separated by a trench. Then the method includes depositing a first non-magnetic material in the trench using ion-beam assisted deposition and planarizing using a chemical-mechanical polishing step.
申请公布号 US8365393(B1) 申请公布日期 2013.02.05
申请号 US20090510349 申请日期 2009.07.28
申请人 SEAGATE TECHNOLOGY LLC;BENAKLI MOURAD;MALLARY MICHAEL 发明人 BENAKLI MOURAD;MALLARY MICHAEL
分类号 G11B5/187;C23C14/22 主分类号 G11B5/187
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