发明名称 |
Manufacturing methods for write heads with floating side shields |
摘要 |
Methods for manufacturing a magnetic head for a disk drive. The methods include the steps of depositing a first non-magnetic spacer layer, depositing a plating seed layer on the first non-magnetic spacer layer and plating at least one side shield and a pole tip layer on the plating seed layer, each of the at least one side shield and the pole tip layer separated by a trench. Then the method includes depositing a first non-magnetic material in the trench using ion-beam assisted deposition and planarizing using a chemical-mechanical polishing step.
|
申请公布号 |
US8365393(B1) |
申请公布日期 |
2013.02.05 |
申请号 |
US20090510349 |
申请日期 |
2009.07.28 |
申请人 |
SEAGATE TECHNOLOGY LLC;BENAKLI MOURAD;MALLARY MICHAEL |
发明人 |
BENAKLI MOURAD;MALLARY MICHAEL |
分类号 |
G11B5/187;C23C14/22 |
主分类号 |
G11B5/187 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|