Method for fabricating a microelectromechanical resonator

摘要

A method is disclosed which calculates dimensions for a MEM resonator in terms of integer multiples of a grid width G for reticles used to fabricate the resonator, including an actual sub-width La=NG and an effective electrode width We=MG where N and M are integers which minimize a frequency error fe=fd−fa between a desired resonant frequency fd and an actual resonant frequency fa. The method can also be used to calculate an overall width Wo for the MEM resonator, and an effective electrode length Le which provides a desired motional impedance for the MEM resonator. The MEM resonator can then be fabricated using these values for La, We, Wo and Le. The method can also be applied to a number j of MEM resonators formed on a common substrate.