发明名称 |
MEMS device with independent rotation in two axes of rotation |
摘要 |
A MEMS arrangement is provided that has a top plane containing a rotatable element such as a mirror. There is a middle support frame plane, and a lower electrical substrate plane. The rotatable element is supported by a support frame formed in the middle support frame plane so as to be rotatable with respect to the frame in a first axis of rotation. The frame is mounted so as to be rotatable with respect to a second axis of rotation. Rotation in the first axis of rotation is substantially independent of rotation in the second axis of rotation.
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申请公布号 |
US8368983(B2) |
申请公布日期 |
2013.02.05 |
申请号 |
US20100828050 |
申请日期 |
2010.06.30 |
申请人 |
MICRALYNE, INC.;KEYWORTH BARRIE;KORNELSEN KEVIN;CRAWFORD JARED |
发明人 |
KEYWORTH BARRIE;KORNELSEN KEVIN;CRAWFORD JARED |
分类号 |
G02B26/08 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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