发明名称 Method for manufacturing semiconductor light-emitting device and semiconductor light emitting device
摘要 A method for manufacturing a semiconductor light-emitting device of the invention includes: forming a semiconductor layer including a light-emitting layer and a first interconnect layer on a major surface of a temporary substrate; dividing the semiconductor layer and the first interconnect layer into a plurality of chips by a trench; collectively bonding each divided portion of the first interconnect layer of a plurality of chips to be bonded not adjacent to each other out of the plurality of chips on the temporary substrate to a second interconnect layer while opposing the major surface of the temporary substrate and the major surface of a supporting substrate forming the second interconnect layer, and collectively transferring a plurality of the bonded chips from the temporary substrate to the supporting substrate after irradiating interfaces between the bonded chips and the temporary substrate and separating the chips and the temporary substrate from each other.
申请公布号 US8367523(B2) 申请公布日期 2013.02.05
申请号 US20100726452 申请日期 2010.03.18
申请人 KABUSHIKI KAISHA TOSHIBA;SUGIZAKI YOSHIAKI;KOJIMA AKIHIRO;ANDO MASANOBU;FURUKAWA KAZUYOSHI 发明人 SUGIZAKI YOSHIAKI;KOJIMA AKIHIRO;ANDO MASANOBU;FURUKAWA KAZUYOSHI
分类号 H01L21/46;H01L21/00 主分类号 H01L21/46
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