发明名称 Method of exposing substrate, apparatus for performing the same, and method of manufacturing display substrate using the same
摘要 A photoresist layer exposed through first slits of a mask is exposed using first light. The photoresist layer exposed through second slits of the mask is exposed by using second light. The first light passes thorough a transflective shutter to generate the second light.
申请公布号 US8367281(B2) 申请公布日期 2013.02.05
申请号 US20100778574 申请日期 2010.05.12
申请人 SAMSUNG DISPLAY CO., LTD.;AHN BO-KYOUNG;JO GUG-RAE;YOO HONG-SUK;KIM CHANG-HOON;KIM MIN-UK;BAE JOO-HAN 发明人 AHN BO-KYOUNG;JO GUG-RAE;YOO HONG-SUK;KIM CHANG-HOON;KIM MIN-UK;BAE JOO-HAN
分类号 G03F7/20;G02B5/20 主分类号 G03F7/20
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