| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator which enlarges a movable range of a movable electrode without increasing a thickness of the movable electrode. <P>SOLUTION: An actuator comprises: two fixed electrodes 102 and 103, disposed spaced apart on a substrate 101 and formed to make a space narrower as closer to the substrate 101; and a movable electrode 104 being displaceable in a direction normal to the substrate 101 between the two fixed electrodes 102 and 103, and having a width within a range being not contact with two fixed electrodes 102 and 103. The fixed electrode 102 and fixed electrode 103 are set to the same potential, for example. The movable electrode 104 is formed to have a line symmetrical cross-sectional shape in its extending direction. <P>COPYRIGHT: (C)2013,JPO&INPIT |
